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hmi asmlThe HMI eP5 is ASML's highest-resolution e-beam system, offering CD metrology .ASML’s HMI eScan 1000 is the world’s first multiple e-beam (multibeam) wafer .ASML Holding NV (ASML) and Hermes Microvision, Inc. (HMI) announce today .
hmi asmlThe HMI eP5 combines precise CD metrology with high-resolution defect detection in one system. It can operate in both physical defect and voltage contrast mode, and has a large field of view and a pattern fidelity .
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